Ludger Viefhues

LUDGER VIEFHUES is Chief Financial Officer and Vice President of Finance
at Mattson Technology, Inc. Mr. Viefhues started his career in 1968 in
the VEBA Group, with assignments in Germany in finance, controlling,
operations and general management. From 1989 to 1992, Mr. Viefhues
served as the Chief Financial Officer of MEMC Electronic Materials, St.
Louis, Missouri. In 1993, he was appointed as the Chief Financial
Officer of Huels AG and Chairman of MEMC before returning to MEMC in St.
Louis as the Chief Executive Officer in 1996. Having served on the STEAG
Electronic Systems Supervisory Board for several years, Mr. Viefhues
joined STEAG RTP Systems as the Chief Financial Officer in 1999 and
became CFO for Mattson after it acquired STEAG in 2001. Mr. Viefhues
graduated from the University of Muenster, Germany, with a degree in
Business Administration.