Paul F. McLaughlin

Paul F. McLaughlin has served as Chairman since January 2000 and Chief Executive Officer and as a Director of Rudolph Technologies, Inc., since June 1996. He has more than 20 years of experience in the semiconductor capital equipment business, including six years as Vice President at PerkinElmer Inc., a pioneer in optical lithography. Mr. McLaughlin holds a B.S. in metallurgical engineering from Rensselaer Polytechnic Institute, an M.S. in metallurgy and materials science from Lehigh University and an MBA from Harvard University, Graduate School of Business Administration.