C. Douglas Marsh

C. DOUGLAS MARSH has been with ASM Lithography Holding N. V. since 1988
and currently holds the position of Vice President, Business Integration
& US Institutional Investor Relations. In 1991 Mr. Marsh was appointed
President of US Operations in addition to his original responsibilities
as Vice President of Worldwide Sales. Also, since ASML’s public offering
in 1995, he has been actively involved with the investment community as
the VP of U.S. Institutional Investor Relations. In mid-1998 he decided
to apply his skills to new opportunities for ASML, beginning with the
establishment of the US Technology Development Center. From July 1999 to
April 2001 Mr. Marsh also held the position of President, ASML
MaskTools. The most recent addition in January 2001 has been the new
position of Vice President, Business Integration as ASML moves forward
after the acquisition of Silicon Valley Group. Mr. Marsh has nearly 30
years’ experience in the semiconductor equipment industry, including
Director of Marketing for Varian, 12 years as Director of Sales for GCA,
and Vice President of Sales and Marketing with ATEQ Corporation.