Brian R. Bachman

BRIAN R. BACHMAN has been the Vice Chairman and Chief Executive Officer
of Axcelis Technologies, Inc., since April 2000, and a Director of the
company since May 2000. He was formerly Senior Vice President and Group
Executive-Hydraulics, Semiconductor Equipment and Specialty Controls of
Eaton Corporation, a position he held since December 1995. From 1991 to
1995, he was Vice President and General Manager for the Standard
Products Business Group of Philips Semiconductors B.V. Prior to joining
Philips, Mr. Bachman held positions with FMC Corporation, General
Electric Company and TRW Inc. and was President of General
Semiconductor, Inc., a subsidiary of Square D Corporation and a Group
General Manager with ITT Industries, Inc. He is a member of the Board of
Directors of Keithley Instruments, Inc., the Board of Governors of the
Electronic Industries Association and the Board of Vocational Guidance
Services. Mr. Bachman also serves on Northwestern University’s Kellogg
McCormick Master of Management in Manufacturing Program Advisory Board.